Optical Surface Metrology System

Mar Surf WS 1 from Mahr Federal uses white light interferometry to offer a vertical resolution of 0. 1 and provides 3D measurement in a few seconds.

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Mar Surf WS 1 from Mahr Federal uses white light interferometry to offer a vertical resolution of 0.1 and provides 3D measurement in a few seconds. Using MarSurf XT 20 topographical evaluation software, the system can be configured to work both in the lab and on the shop floor.

The white light optical sensor in the system enables the rapid, high-precision recording of surface topography on a range of materials. Using white light and a CCD camera, the system is able to collect height information through the camera's field of view. Both the test surface area and a high-precision reference surface built into the objective lens are imaged simultaneously by the camera. During measurement, the Mirau objective is moved in small steps in the Z direction, using a piezo positioner. The resultant interferograms are recorded as image stacks and converted into height data.

The system can be used in both precision inspection rooms and production environments, and on both reflective and rough workpieces. High vertical resolution allows the surface roughness measurements on optical components such as lenses or mirrors with sub-micrometer accuracy.

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