ZeGage Plus Optical Profiler Offers Speed and Precision

Zygo Corporation’s ZeGage Plus optical profiler, an instrument for the 3D measurement of surface topography and roughness, provides the same ease of use, vibration robustness and small footprint as the ZeGage profiler, but with a higher level of precision, faster measurement speed and an increased range of measurable surfaces and features, the company says.

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Zygo Corporation’s ZeGage Plus optical profiler, an instrument for the 3D measurement of surface topography and roughness, provides the same ease of use, vibration robustness and small footprint as the ZeGage profiler, but with a higher level of precision, faster measurement speed and an increased range of measurable surfaces and features, the company says.

The profiler uses the company’s Mx software for enhanced data visualization and quantification of step heights, texture and volumetric applications. This metrology software for data acquisition and analysis provides added capabilities for regions analysis and advanced patterns. ZeGage Plus profilers with optional automated XY sample stages have the added ability to combine overlapping measurements for the characterization of large areas.

The user has the ability to select the desired magnification and field of view without affecting height precision. Many of Zygo’s parfocal objectives can be used with ZeGage Plus profilers, from 1.4× to 50×, as well as 1× to 10× long working distance, and a 5× super-long working distance lens.

 

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